ElectronBackscatterDiffraction

ElectronBackscatterDiffraction
ID	OSW0a843d35b10f5fc1887ba4e65416436a
UUID	0a843d35-b10f-5fc1-887b-a4e65416436a
Label	ElectronBackscatterDiffraction
Machine compatible name	ElectronBackscatterDiffraction
Statements (outgoing)

Statements (incoming)

Description

Electron backscatter diffraction (EBSD) is a scanning electron microscopy (SEM) technique used to study the crystallographic structure of materials. EBSD is carried out in a scanning electron microscope equipped with an EBSD detector comprising at least a phosphorescent screen, a compact lens and a low-light camera. In this configuration, the SEM incident beam hits the tilted sample. As backscattered electrons leave the sample, they interact with the crystal's periodic atomic lattice planes and diffract according to Bragg's law at various scattering angles before reaching the phosphor screen forming Kikuchi patterns (EBSPs). EBSD spatial resolution depends on many factors, including the nature of the material under study and the sample preparation. Thus, EBSPs can be indexed to provide information about the material's grain structure, grain orientation, and phase at the micro-scale. EBSD is applied for impurities and defect studies, plastic deformation, and statistical analysis for average misorientation, grain size, and crystallographic texture. EBSD can also be combined with energy-dispersive X-ray spectroscopy (EDS), cathodoluminescence (CL), and wavelength-dispersive X-ray spectroscopy (WDS) for advanced phase identification and materials discovery.

Category (Class)

OWL Class
Imported fromA prefixed IRI defining this entry as a imported term. In OSW the prefix must be a registered imported ontology.<br>Definition: OWL Class	https://w3id.org/emmo/domain/characterisation-methodology/chameo#ElectronBackscatterDiffraction

EmmoClass
Supercategories<br>Definition: Category (Class), OWL Class, EmmoClass	ScatteringAndDiffraction ScanningElectronMicroscopy
Alternative label<br>Definition: EmmoClass	EBSD [en]
metaclass<br>Definition: Category (Class), EmmoClass	EmmoClass

jsondata

rdf_type

"owl:Class"

uuid

"0a843d35-b10f-5fc1-887b-a4e65416436a"

iri

"https://w3id.org/emmo/domain/characterisation-methodology/chameo#ElectronBackscatterDiffraction"

name

"ElectronBackscatterDiffraction"

label

text	"ElectronBackscatterDiffraction"
lang	"en"

description

text

"Electron backscatter diffraction (EBSD) is a scanning electron microscopy (SEM) technique used to study the crystallographic structure of materials. EBSD is carried out in a scanning electron microscope equipped with an EBSD detector comprising at least a phosphorescent screen, a compact lens and a low-light camera. In this configuration, the SEM incident beam hits the tilted sample. As backscattered electrons leave the sample, they interact with the crystal's periodic atomic lattice planes and diffract according to Bragg's law at various scattering angles before reaching the phosphor screen forming Kikuchi patterns (EBSPs). EBSD spatial resolution depends on many factors, including the nature of the material under study and the sample preparation. Thus, EBSPs can be indexed to provide information about the material's grain structure, grain orientation, and phase at the micro-scale. EBSD is applied for impurities and defect studies, plastic deformation, and statistical analysis for average misorientation, grain size, and crystallographic texture. EBSD can also be combined with energy-dispersive X-ray spectroscopy (EDS), cathodoluminescence (CL), and wavelength-dispersive X-ray spectroscopy (WDS) for advanced phase identification and materials discovery."

lang

"en"

ElectronBackscatterDiffraction

Description

Graph

Attachments