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SecondaryIonMassSpectrometry

Category:OSW8d1fa6af1c4055668605b90153636112 /
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SecondaryIonMassSpectrometry
ID OSW8d1fa6af1c4055668605b90153636112
UUID 8d1fa6af-1c40-5566-8605-b90153636112
Label SecondaryIonMassSpectrometry
Machine compatible name SecondaryIonMassSpectrometry
Statements (outgoing)
Statements (incoming)

Description

Secondary-ion mass spectrometry (SIMS) is a technique used to analyze the composition of solid surfaces and thin films by sputtering the surface of the specimen with a focused primary ion beam and collecting and analyzing ejected secondary ions.

Category (Class)
OWL Class
Imported fromA prefixed IRI defining this entry as a imported term. In OSW the prefix must be a registered imported ontology.<br>Definition: OWL Class https://w3id.org/emmo/domain/characterisation-methodology/chameo#SecondaryIonMassSpectrometry
EmmoClass
Supercategories<br>Definition: Category (Class), OWL Class, EmmoClass
Alternative label<br>Definition: EmmoClass
  • SIMS [en]
    • metaclass<br>Definition: Category (Class), EmmoClass
  • EmmoClass
    • jsondata
    rdf_type
    "owl:Class"
    uuid"8d1fa6af-1c40-5566-8605-b90153636112"
    iri"https://w3id.org/emmo/domain/characterisation-methodology/chameo#SecondaryIonMassSpectrometry"
    name"SecondaryIonMassSpectrometry"
    label
    text"SecondaryIonMassSpectrometry"
    lang"en"
    description
    text"Secondary-ion mass spectrometry (SIMS) is a technique used to analyze the composition of solid surfaces and thin films by sputtering the surface of the specimen with a focused primary ion beam and collecting and analyzing ejected secondary ions."
    lang"en"
    meta
    uuid"50937bb3-7380-485d-87df-7f78e7fb3dd0"
    wiki_page
    title"OSW8d1fa6af1c4055668605b90153636112"
    namespace"Category"
    change_id
    "4caad4a3-8d2d-4691-8196-627860411931"
    type
    "Category:OSW57beed5e1294434ba77bb6516e461456"
    subclass_of
    "Category:OSW12d6c2f4c8785ac1b7ee1f47b1e8dbe4"
    metaclass
    "Category:OSW57beed5e1294434ba77bb6516e461456"
    imported_from"chameo:SecondaryIonMassSpectrometry"
    altLabel
    text"SIMS"
    lang"en"

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