Ellipsometry

Ellipsometry
ID	OSW38b6b4be08c152929587544f6015a30b
UUID	38b6b4be-08c1-5292-9587-544f6015a30b
Label	Ellipsometry
Machine compatible name	Ellipsometry
Statements (outgoing)

Statements (incoming)

Description

Ellipsometry is an optical technique that uses polarised light to probe the dielectric properties of a sample (optical system). The common application of ellipsometry is the analysis of thin films. Through the analysis of the state of polarisation of the light that is reflected from the sample, ellipsometry yields information on the layers that are thinner than the wavelength of the light itself, down to a single atomic layer or less. Depending on what is already known about the sample, the technique can probe a range of properties including layer thickness, morphology, and chemical composition.

Category (Class)

OWL Class
Imported fromA prefixed IRI defining this entry as a imported term. In OSW the prefix must be a registered imported ontology.<br>Definition: OWL Class	https://w3id.org/emmo/domain/characterisation-methodology/chameo#Ellipsometry

EmmoClass
Supercategories<br>Definition: Category (Class), OWL Class, EmmoClass	OpticalTesting
metaclass<br>Definition: Category (Class), EmmoClass	EmmoClass

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jsondata

rdf_type

"owl:Class"

uuid

"38b6b4be-08c1-5292-9587-544f6015a30b"

iri

"https://w3id.org/emmo/domain/characterisation-methodology/chameo#Ellipsometry"

name

"Ellipsometry"

label

text	"Ellipsometry"
lang	"en"

description

text

"Ellipsometry is an optical technique that uses polarised light to probe the dielectric properties of a sample (optical system). The common application of ellipsometry is the analysis of thin films. Through the analysis of the state of polarisation of the light that is reflected from the sample, ellipsometry yields information on the layers that are thinner than the wavelength of the light itself, down to a single atomic layer or less. Depending on what is already known about the sample, the technique can probe a range of properties including layer thickness, morphology, and chemical composition."

lang

"en"