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- ElectronProbeMicroanalysis + (Electron probe microanalysis (EPMA) is use … Electron probe microanalysis (EPMA) is used for quantitative analysis of the elemental composition of solid specimens at a micrometer scale. The method uses bombardment of the specimen by keV electrons to excite characteristic X-rays from the sample, which are then detected by using wavelength-dispersive (WD) spectrometers. wavelength-dispersive (WD) spectrometers.)